"Position-Dependent Motion Feedforward via Gaussian Processes: Applied to ..."

Maurice Poot et al. (2024)

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DOI: 10.1109/TCST.2024.3385632

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type: Journal Article

metadata version: 2024-11-08

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Maurice Poot, Max van Haren, Dragan Kostic, Jim Portegies, Tom Oomen:
Position-Dependent Motion Feedforward via Gaussian Processes: Applied to Snap and Force Ripple in Semiconductor Equipment. IEEE Trans. Control. Syst. Technol. 32(6): 1968-1982 (2024)

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