"Connecting System Identification and Robust Control for Next-Generation ..."

Tom Oomen et al. (2014)

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DOI: 10.1109/TCST.2013.2245668

access: closed

type: Journal Article

metadata version: 2020-06-08

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Tom Oomen, Robbert van Herpen, Sander Quist, Marc M. J. van de Wal, Okko H. Bosgra, Maarten Steinbuch:
Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage. IEEE Trans. Control. Syst. Technol. 22(1): 102-118 (2014)

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