"Directional Repetitive Control of a Metrological AFM."

Roel J. E. Merry et al. (2011)

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DOI: 10.1109/TCST.2010.2091642

access: closed

type: Journal Article

metadata version: 2020-06-08

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Roel J. E. Merry, Michael J. C. Ronde, René van de Molengraft, Richard K. Koops, Maarten Steinbuch:
Directional Repetitive Control of a Metrological AFM. IEEE Trans. Control. Syst. Technol. 19(6): 1622-1629 (2011)

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