"Control system design for a rapid thermal processing system."

Ching-An Lin, Yaw-Kuen Jan (2001)

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DOI: 10.1109/87.896753

access: closed

type: Journal Article

metadata version: 2020-06-08

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Ching-An Lin, Yaw-Kuen Jan:
Control system design for a rapid thermal processing system. IEEE Trans. Control. Syst. Technol. 9(1): 122-129 (2001)

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