"Reliability Enhancement of MEMS Lateral Comb Resonators Under Fault ..."

Afshin Izadian, Parviz Famouri (2008)

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DOI: 10.1109/TCST.2007.912233

access: closed

type: Journal Article

metadata version: 2024-10-06

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Afshin Izadian, Parviz Famouri:
Reliability Enhancement of MEMS Lateral Comb Resonators Under Fault Conditions. IEEE Trans. Control. Syst. Technol. 16(4): 726-734 (2008)

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