"Multivariable feedback relevant system identification of a wafer stepper ..."

Raymond A. de Callafon, Paul M. J. Van den Hof (2001)

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DOI: 10.1109/87.911390

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type: Journal Article

metadata version: 2020-06-08

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Raymond A. de Callafon, Paul M. J. Van den Hof:
Multivariable feedback relevant system identification of a wafer stepper system. IEEE Trans. Control. Syst. Technol. 9(2): 381-390 (2001)

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