"Adaptive Feedforward for a Wafer Stage in a Lithographic Tool."

Hans Butler (2013)

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DOI: 10.1109/TCST.2012.2188102

access: closed

type: Journal Article

metadata version: 2020-06-08

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Hans Butler:
Adaptive Feedforward for a Wafer Stage in a Lithographic Tool. IEEE Trans. Control. Syst. Technol. 21(3): 875-881 (2013)

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