"Iterative Identification and Control Using Non-normalized Coprime Factors ..."

Frank Boeren, Alexander Lanzon, Tom Oomen (2020)

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DOI: 10.1109/TCST.2018.2877680

access: open

type: Journal Article

metadata version: 2025-01-19

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Frank Boeren, Alexander Lanzon, Tom Oomen:
Iterative Identification and Control Using Non-normalized Coprime Factors With Application in Wafer Stage Motion Control. IEEE Trans. Control. Syst. Technol. 28(2): 413-424 (2020)

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