"High-order electromechanical ΣΔ modulation in micromachined ..."

Vladimir P. Petkov, Bernhard E. Boser (2006)

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DOI: 10.1109/TCSI.2006.869901

access: closed

type: Journal Article

metadata version: 2020-05-22

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Vladimir P. Petkov, Bernhard E. Boser:
High-order electromechanical ΣΔ modulation in micromachined inertial sensors. IEEE Trans. Circuits Syst. I Regul. Pap. 53-I(5): 1016-1022 (2006)

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