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"GAN-OPC: Mask Optimization With Lithography-Guided Generative Adversarial ..."
Haoyu Yang et al. (2020)
- Haoyu Yang, Shuhe Li, Zihao Deng, Yuzhe Ma, Bei Yu, Evangeline F. Y. Young:
GAN-OPC: Mask Optimization With Lithography-Guided Generative Adversarial Nets. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 39(10): 2822-2834 (2020)
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