"Semantic Segmentation-Based Wafer Map Mixed-Type Defect Pattern Recognition."

Jinda Yan, Yi Sheng, Minghao Piao (2023)

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DOI: 10.1109/TCAD.2023.3274958

access: closed

type: Journal Article

metadata version: 2023-10-28

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Jinda Yan, Yi Sheng, Minghao Piao:
Semantic Segmentation-Based Wafer Map Mixed-Type Defect Pattern Recognition. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 42(11): 4065-4074 (2023)

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