"Numerical modeling of nonplanar oxidation coupled with stress effects."

Hiroyuki Umimoto et al. (1989)

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DOI: 10.1109/43.31516

access: closed

type: Journal Article

metadata version: 2020-09-24

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Hiroyuki Umimoto, Shinji Odanaka, Ichiro Nakao, Hideya Esaki:
Numerical modeling of nonplanar oxidation coupled with stress effects. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 8(6): 599-607 (1989)

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