"An Automatic Optical Simulation-Based Lithography Hotspot Fix Flow for ..."

Yang-Shan Tong, Sao-Jie Chen (2010)

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DOI: 10.1109/TCAD.2010.2043756

access: closed

type: Journal Article

metadata version: 2020-09-24

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Yang-Shan Tong, Sao-Jie Chen:
An Automatic Optical Simulation-Based Lithography Hotspot Fix Flow for Post-Route Optimization. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 29(5): 671-684 (2010)

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