"Model-based dummy feature placement for oxide chemical-mechanicalpolishing ..."

Ruiqi Tian, Martin D. F. Wong, Robert Boone (2001)

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DOI: 10.1109/43.931037

access: closed

type: Journal Article

metadata version: 2022-10-02

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Ruiqi Tian, Martin D. F. Wong, Robert Boone:
Model-based dummy feature placement for oxide chemical-mechanicalpolishing manufacturability. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 20(7): 902-910 (2001)

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