"Fast Verification of Guide-Patterns for Directed Self-Assembly Lithography."

Seongbo Shim, Youngsoo Shin (2017)

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DOI: 10.1109/TCAD.2016.2629419

access: closed

type: Journal Article

metadata version: 2020-09-24

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Seongbo Shim, Youngsoo Shin:
Fast Verification of Guide-Patterns for Directed Self-Assembly Lithography. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 36(9): 1522-1531 (2017)

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