"Three-dimensional simulation of HPCVD-linking continuum transport and ..."

Wolfgang Pyka et al. (1999)

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DOI: 10.1109/43.811323

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type: Journal Article

metadata version: 2022-04-09

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Wolfgang Pyka, Peter Fleischmann, Bernhard Haindl, Siegfried Selberherr:
Three-dimensional simulation of HPCVD-linking continuum transport and reaction kinetics with topography simulation. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 18(12): 1741-1749 (1999)

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