"Simulation of Critical IC-Fabrication Steps."

Peter Pichler et al. (1985)

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DOI: 10.1109/TCAD.1985.1270136

access: closed

type: Journal Article

metadata version: 2020-09-24

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Peter Pichler, Werner Jüngling, Siegfried Selberherr, Edgar Guerrero, Hans W. Pötzl:
Simulation of Critical IC-Fabrication Steps. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 4(4): 384-397 (1985)

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