"Numerical modeling of glass flow and spin-on planarization."

Francisco A. Leon (1988)

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DOI: 10.1109/43.3146

access: closed

type: Journal Article

metadata version: 2020-09-24

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Francisco A. Leon:
Numerical modeling of glass flow and spin-on planarization. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 7(2): 168-173 (1988)

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