"A fast electron beam lithography simulator based on the Boltzmann ..."

Nikos Glezos, Ioannis Raptis (1996)

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DOI: 10.1109/43.486275

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type: Journal Article

metadata version: 2022-10-02

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Nikos Glezos, Ioannis Raptis:
A fast electron beam lithography simulator based on the Boltzmann transport equation. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 15(1): 92-102 (1996)

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