"Semiconductor wafer representation for TCAD."

Martin D. Giles et al. (1994)

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DOI: 10.1109/43.273747

access: closed

type: Journal Article

metadata version: 2020-09-24

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  - https://dblp.org/rec/journals/tcad/GilesBCDKLMNRWWW94
Martin D. Giles, Duane S. Boning, Goodwin R. Chin, Walter C. Dietrich Jr., Michael S. Karasick, Mark E. Law, Purnendu K. Mozumder, Lee R. Nackman, V. T. Rajan, Duncan M. Hank Walker, Robert H. Wang, Alexander S. Wong:
Semiconductor wafer representation for TCAD. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 13(1): 82-95 (1994)

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