"A Novel Layout Decomposition Algorithm for Triple Patterning Lithography."

Shao-Yun Fang, Yao-Wen Chang, Wei-Yu Chen (2014)

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DOI: 10.1109/TCAD.2013.2288678

access: closed

type: Journal Article

metadata version: 2020-09-24

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Shao-Yun Fang, Yao-Wen Chang, Wei-Yu Chen:
A Novel Layout Decomposition Algorithm for Triple Patterning Lithography. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 33(3): 397-408 (2014)

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