"Flexible Packed Stencil Design With Multiple Shaping Apertures and ..."

Chris C. N. Chu, Wai-Kei Mak (2015)

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DOI: 10.1109/TCAD.2015.2427256

access: closed

type: Journal Article

metadata version: 2020-09-24

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Chris C. N. Chu, Wai-Kei Mak:
Flexible Packed Stencil Design With Multiple Shaping Apertures and Overlapping Shots for E-beam Lithography. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 34(10): 1652-1663 (2015)

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