"Predictive Formulae for OPC With Applications to Lithography-Friendly Routing."

Tai-Chen Chen, Guang-Wan Liao, Yao-Wen Chang (2010)

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DOI: 10.1109/TCAD.2009.2032359

access: closed

type: Journal Article

metadata version: 2020-09-24

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Tai-Chen Chen, Guang-Wan Liao, Yao-Wen Chang:
Predictive Formulae for OPC With Applications to Lithography-Friendly Routing. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 29(1): 40-50 (2010)

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