"Micromachined polysilicon power dissipation: simulation and experiment."

Walter Allegretto et al. (1997)

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DOI: 10.1109/43.640620

access: closed

type: Journal Article

metadata version: 2020-09-24

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Walter Allegretto, Bing Shen, Todd C. Kleckner, Alexander M. Robinson:
Micromachined polysilicon power dissipation: simulation and experiment. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 16(6): 627-637 (1997)

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