"Steady-State Throughput and Scheduling Analysis of Multicluster Tools: A ..."

Jingang Yi et al. (2008)

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DOI: 10.1109/TASE.2007.906678

access: closed

type: Journal Article

metadata version: 2020-04-02

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Jingang Yi, Shengwei Ding, Dezhen Song, Mike Tao Zhang:
Steady-State Throughput and Scheduling Analysis of Multicluster Tools: A Decomposition Approach. IEEE Trans Autom. Sci. Eng. 5(2): 321-336 (2008)

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