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"High-Bandwidth Control of Nanopositioning Stages via an Inner-Loop Delayed ..."

Mei-Ju Yang et al. (2015)

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DOI: 10.1109/TASE.2015.2451368

access: closed

type: Journal Article

metadata version: 2024-02-14

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  - https://dblp.org/rec/journals/tase/YangNLGZ15
Mei-Ju Yang, Jin-Bo Niu, Chun-Xia Li, Guo-Ying Gu, Li-Min Zhu:
High-Bandwidth Control of Nanopositioning Stages via an Inner-Loop Delayed Position Feedback. IEEE Trans Autom. Sci. Eng. 12(4): 1357-1368 (2015)

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