"Adaptive Neuro-Fuzzy Inference System Modeling of MRR and WIWNU in CMP ..."

Lih Wen-Chen et al. (2008)

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DOI: 10.1109/TASE.2007.911683

access: closed

type: Journal Article

metadata version: 2020-06-15

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Lih Wen-Chen, Satish T. S. Bukkapatnam, Prahalad K. Rao, Naga Chandrasekharan, Ranga Komanduri:
Adaptive Neuro-Fuzzy Inference System Modeling of MRR and WIWNU in CMP Process With Sparse Experimental Data. IEEE Trans Autom. Sci. Eng. 5(1): 71-83 (2008)

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