"Hierarchical Decision-Making for Qualification Management in Wafer Fabs: A ..."

Denny Kopp, Lars Mönch (2023)

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DOI: 10.1109/TASE.2022.3149735

access: closed

type: Journal Article

metadata version: 2023-01-31

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Denny Kopp, Lars Mönch:
Hierarchical Decision-Making for Qualification Management in Wafer Fabs: A Simulation Study. IEEE Trans Autom. Sci. Eng. 20(1): 320-333 (2023)

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