"Scheduling Dual-Armed Cluster Tools for Concurrent Processing of Multiple ..."

Sung-Gil Ko, Tae-Sun Yu, Tae-Eog Lee (2019)

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DOI: 10.1109/TASE.2018.2868004

access: closed

type: Journal Article

metadata version: 2020-04-02

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Sung-Gil Ko, Tae-Sun Yu, Tae-Eog Lee:
Scheduling Dual-Armed Cluster Tools for Concurrent Processing of Multiple Wafer Types With Identical Job Flows. IEEE Trans Autom. Sci. Eng. 16(3): 1058-1070 (2019)

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