"Feedback Control of Cluster Tools: Stability Against Random Time Disruptions."

Chulhan Kim, Tae-Sun Yu, Tae-Eog Lee (2022)

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DOI: 10.1109/TASE.2021.3070346

access: closed

type: Journal Article

metadata version: 2022-07-25

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Chulhan Kim, Tae-Sun Yu, Tae-Eog Lee:
Feedback Control of Cluster Tools: Stability Against Random Time Disruptions. IEEE Trans Autom. Sci. Eng. 19(3): 2008-2015 (2022)

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