"Compensating Misalignment Using Dynamic Random-Effect Control System: A ..."

Marzieh Khakifirooz, Chen-Fu Chien, Mahdi Fathi (2019)

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DOI: 10.1109/TASE.2019.2894668

access: closed

type: Journal Article

metadata version: 2023-04-17

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Marzieh Khakifirooz, Chen-Fu Chien, Mahdi Fathi:
Compensating Misalignment Using Dynamic Random-Effect Control System: A Case of High-Mixed Wafer Fabrication. IEEE Trans Autom. Sci. Eng. 16(4): 1788-1799 (2019)

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