"Comments on "Timed Petri Nets in Modeling and Analysis of Cluster Tools"."

MuDer Jeng (2005)

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DOI: 10.1109/TASE.2004.840069

access: closed

type: Journal Article

metadata version: 2020-04-02

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MuDer Jeng:
Comments on "Timed Petri Nets in Modeling and Analysis of Cluster Tools". IEEE Trans Autom. Sci. Eng. 2(1): 92-93 (2005)

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