"Monitoring Spatial Uniformity of Particle Distributions in Manufacturing ..."

Xiaohu Huang et al. (2017)

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DOI: 10.1109/TASE.2015.2479088

access: closed

type: Journal Article

metadata version: 2020-04-02

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Xiaohu Huang, Qiang Zhou, Li Zeng, Xiaodong Li:
Monitoring Spatial Uniformity of Particle Distributions in Manufacturing Processes Using the K Function. IEEE Trans Autom. Sci. Eng. 14(2): 1031-1041 (2017)

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