"Multifeature, Sparse-Based Approach for Defects Detection and ..."

Bashar Haddad et al. (2018)

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DOI: 10.1109/TASE.2016.2594288

access: closed

type: Journal Article

metadata version: 2022-12-07

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Bashar Haddad, Sen Yang, Lina J. Karam, Jieping Ye, Nital S. Patel, Martin W. Braun:
Multifeature, Sparse-Based Approach for Defects Detection and Classification in Semiconductor Units. IEEE Trans Autom. Sci. Eng. 15(1): 145-159 (2018)

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