"Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey."

Guo-Ying Gu et al. (2016)

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DOI: 10.1109/TASE.2014.2352364

access: closed

type: Journal Article

metadata version: 2024-02-14

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Guo-Ying Gu, Li-Min Zhu, Chun-Yi Su, Han Ding, Sergej Fatikow:
Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey. IEEE Trans Autom. Sci. Eng. 13(1): 313-332 (2016)

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