"Product-to-Product Virtual Metrology of Color Filter Processes in Panel ..."

Shu-Kai S. Fan, Xiao-Wen Chang, Yu-Yu Lin (2022)

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DOI: 10.1109/TASE.2021.3124157

access: closed

type: Journal Article

metadata version: 2022-11-13

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Shu-Kai S. Fan, Xiao-Wen Chang, Yu-Yu Lin:
Product-to-Product Virtual Metrology of Color Filter Processes in Panel Industry. IEEE Trans Autom. Sci. Eng. 19(4): 3496-3507 (2022)

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