"Optimal Scheduling of Multicluster Tools With Constant Robot Moving Times, ..."

Wai Kin (Victor) Chan, Jingang Yi, Shengwei Ding (2011)

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DOI: 10.1109/TASE.2010.2046891

access: closed

type: Journal Article

metadata version: 2020-04-02

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Wai Kin (Victor) Chan, Jingang Yi, Shengwei Ding:
Optimal Scheduling of Multicluster Tools With Constant Robot Moving Times, Part I: Two-Cluster Analysis. IEEE Trans Autom. Sci. Eng. 8(1): 5-16 (2011)

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