"Spatial Variance Spectrum Analysis and Its Application to Unsupervised ..."

Jakey Blue, Argon Chen (2011)

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DOI: 10.1109/TASE.2010.2041775

access: closed

type: Journal Article

metadata version: 2020-04-02

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Jakey Blue, Argon Chen:
Spatial Variance Spectrum Analysis and Its Application to Unsupervised Detection of Systematic Wafer Spatial Variations. IEEE Trans Autom. Sci. Eng. 8(1): 56-66 (2011)

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