"A New Macro-Model of Gas Flow and Parameter Extraction for a CMOS-MEMS ..."

Shu-Jung Chen, Yung-Chuan Wu (2020)

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DOI: 10.3390/SYM12101604

access: open

type: Journal Article

metadata version: 2021-09-16

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  - https://dblp.org/rec/journals/symmetry/ChenW20a
Shu-Jung Chen, Yung-Chuan Wu:
A New Macro-Model of Gas Flow and Parameter Extraction for a CMOS-MEMS Vacuum Sensor. Symmetry 12(10): 1604 (2020)

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