"Simulation metamodel development using uniform design and neural networks ..."

Yiyo Kuo et al. (2007)

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DOI: 10.1016/J.SIMPAT.2007.05.006

access: closed

type: Journal Article

metadata version: 2020-02-24

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Yiyo Kuo, Taho Yang, Brett A. Peters, Ihui Chang:
Simulation metamodel development using uniform design and neural networks for automated material handling systems in semiconductor wafer fabrication. Simul. Model. Pract. Theory 15(8): 1002-1015 (2007)

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