"An Elementary Model for Control of a Semiconductor Etching Process."

Anupam Madhukar et al. (2002)

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DOI: 10.1137/S0036144500382295

access: closed

type: Journal Article

metadata version: 2020-09-29

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Anupam Madhukar, Tyler Parent, I. Gary Rosen, Chunming Wang:
An Elementary Model for Control of a Semiconductor Etching Process. SIAM Rev. 44(4): 678-695 (2002)

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