"A Robust Computational Algorithm for Inverse Photomask Synthesis in ..."

Siu-Kai Choy et al. (2012)

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DOI: 10.1137/110830356

access: closed

type: Journal Article

metadata version: 2020-07-14

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Siu-Kai Choy, Ningning Jia, Chong-Sze Tong, Man-Lai Tang, Edmund Y. Lam:
A Robust Computational Algorithm for Inverse Photomask Synthesis in Optical Projection Lithography. SIAM J. Imaging Sci. 5(2): 625-651 (2012)

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