"Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor."

Grace M. Kepler et al. (2002)

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DOI: 10.1137/S0036139901383280

access: closed

type: Journal Article

metadata version: 2020-10-26

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Grace M. Kepler, H. T. Banks, Hien T. Tran, S. C. Beeler:
Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor. SIAM J. Appl. Math. 62(4): 1251-1280 (2002)

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