"Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying ..."

Yujin Guo, Zhenguo Pan, Michael Jeffrey Ward (2005)

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DOI: 10.1137/040613391

access: closed

type: Journal Article

metadata version: 2020-07-29

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Yujin Guo, Zhenguo Pan, Michael Jeffrey Ward:
Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying Dielectric Properties. SIAM J. Appl. Math. 66(1): 309-338 (2005)

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