"Stress-Dependent Local Oxidation of Silicon."

Jonathan D. Evans, John R. King (2017)

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DOI: 10.1137/16M1060613

access: closed

type: Journal Article

metadata version: 2023-03-21

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Jonathan D. Evans, John R. King:
Stress-Dependent Local Oxidation of Silicon. SIAM J. Appl. Math. 77(6): 2012-2039 (2017)

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