"Temperature-Insensitive Structure Design of Micromachined Resonant ..."

Yonggang Yin et al. (2019)

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DOI: 10.3390/S19071544

access: open

type: Journal Article

metadata version: 2019-06-02

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Yonggang Yin, Zhengxiang Fang, Yunfeng Liu, Fengtian Han:
Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers. Sensors 19(7): 1544 (2019)

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