"Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry ..."

Min Xu et al. (2022)

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DOI: 10.3390/S22031298

access: open

type: Journal Article

metadata version: 2022-02-23

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Min Xu, Ziqi Zhou, Thomas Ahbe, Erwin Peiner, Uwe Brand:
Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements. Sensors 22(3): 1298 (2022)

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