"Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator."

Dunzhu Xia et al. (2020)

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DOI: 10.3390/S20247264

access: open

type: Journal Article

metadata version: 2021-06-01

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Dunzhu Xia, Bing Zhang, Hao Wu, Tao Wu:
Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator. Sensors 20(24): 7264 (2020)

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