"Position Estimator Design for a MEMS Top-Drive Electrostatic Rotary Actuator."

Jemin Woo, Bongsu Hahn, Changsun Ahn (2020)

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DOI: 10.3390/S20247081

access: open

type: Journal Article

metadata version: 2021-06-01

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Jemin Woo, Bongsu Hahn, Changsun Ahn:
Position Estimator Design for a MEMS Top-Drive Electrostatic Rotary Actuator. Sensors 20(24): 7081 (2020)

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