"Development of a Piezoelectric Vacuum Sensing Component for a Wide ..."

Bingyu Wang et al. (2014)

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DOI: 10.3390/S141122099

access: open

type: Journal Article

metadata version: 2020-10-26

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Bingyu Wang, Fan-Chun Hsieh, Che-Yu Lin, Shao-En Chen, Fong-Zhi Chen, Chia-Che Wu:
Development of a Piezoelectric Vacuum Sensing Component for a Wide Pressure Range. Sensors 14(11): 22099-22112 (2014)

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